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Automated Visual Inspection of Defects in Transparent Display Layers Using Light-Field 3-D Imaging | IEEE Journals & Magazine | IEEE Xplore

Automated Visual Inspection of Defects in Transparent Display Layers Using Light-Field 3-D Imaging


Abstract:

Since a display panel comprises multiple layered components, defects may occur within different layers through manufacturing processes. Traditional visual inspection syst...Show More

Abstract:

Since a display panel comprises multiple layered components, defects may occur within different layers through manufacturing processes. Traditional visual inspection systems with a 2D camera cannot identify the occurrence location among layers. Several 3D imaging technologies, such as CT, TSOM, and MRI, suffer from slow performance and a large form factor. In this work, we propose a novel visual inspection method to detect defects on a display panel using light-field 3D imaging. Without powering the target display panel, we first acquire the high-resolution depth information of defects located inside the transparent layers. We then convert the depth information to the object coordinate system to estimate the physical locations of defects. We automatically classify the types of defects and their layer locations along the depth axis in multiple transparent layers of the display panel. Lastly, our experimental results validate that our method can successfully detect and classify various display defects.
Published in: IEEE Transactions on Semiconductor Manufacturing ( Volume: 36, Issue: 3, August 2023)
Page(s): 486 - 493
Date of Publication: 30 May 2023

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Funding Agency:

School of Computing, KAIST, Daejeon, South Korea
Large Display Inspection Machine Development Department, Samsung Display, Yongin, South Korea
School of Computing, KAIST, Daejeon, South Korea
School of Computing, KAIST, Daejeon, South Korea
Large Display Inspection Machine Development Department, Samsung Display, Yongin, South Korea
Large Display Inspection Machine Development Department, Samsung Display, Yongin, South Korea
Large Display Inspection Machine Development Department, Samsung Display, Yongin, South Korea
School of Computing, KAIST, Daejeon, South Korea

School of Computing, KAIST, Daejeon, South Korea
Large Display Inspection Machine Development Department, Samsung Display, Yongin, South Korea
School of Computing, KAIST, Daejeon, South Korea
School of Computing, KAIST, Daejeon, South Korea
Large Display Inspection Machine Development Department, Samsung Display, Yongin, South Korea
Large Display Inspection Machine Development Department, Samsung Display, Yongin, South Korea
Large Display Inspection Machine Development Department, Samsung Display, Yongin, South Korea
School of Computing, KAIST, Daejeon, South Korea
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