Realization of Different Anisotropy Direction for Each Thin-Film Magnetoimpedance Element on the Same Substrate

In this study, we have attempted to realize different magnetic anisotropy locally on the same substrate, i.e., different directions of the easy axis in each area by combining simple Joule heating (J. H.) and the application of a magnetic field with permanent magnets. Orthogonal arranged thin-film magnetoimpedance elements were fabricated on the same substrate, and the easy axis was successfully induced parallel to the width direction of each element, respectively. Each element shows the double-peak impedance profiles after J. H. which is important to obtain a higher sensitive magnetic field sensor. The results enable local anisotropy control, which has been difficult to realize previously and contribute to the integration of multifunctional thin-film magnetic devices on a substrate.