Analysis of Monolithic 3D SRAM with Back-End-of-Line-compatible Transistors

In this work, we analyze the monolithic 3D (M3D) SRAM cells with front-end-of-line (FEOL) Si FinFETs and back-end-of-line (BEOL)-compatible MOS transistors. Two transistor-level partitioning designs for M3D SRAM cells, including (1) 3DPG
BEOL
: BEOL pass-gate (PG) nFETs with FEOL pull-down (PD) and pull-up (PU) transistors and (2) 3DPU
BEOL
: BEOL PU pFETs with FEOL PD/PG nFETs, are investigated, respectively. Through the iterative electrical-thermal simulations, we demonstrate the on-current criteria
$(\mathrm{I}_{\text{oncrit}}=\mathrm{I}_{\text{onBEOL}}/\mathrm{I}_{\text{onFEOL}})$
defined as the Ion ratio of BEOL transistor to FEOL PD nFET for adequate read and write stability. Higher I
oncrit
(89%) for 3DPG
BEOL
SRAM is essential to mitigate the read and write conflict. Compared to conventional 2D Si FinFET SRAM, the 3DPU
BEOL
SRAM (a) demonstrates low
$\mathrm{I}_{\text{oncrit}}(=12.4\%)$
; (b) reduces the cell area (−20.2%); (c) enhances write stability (+70%); (d) improves read (−15%) and write (−23%) speed.