Surface Modification of Cyclo Olefin Polymer film for Electronic Packaging by Vacuum Ultraviolet Irradiation

Vacuum ultraviolet (VUV, λ = 172 nm) excimer radiation can be used to hydrophilize polymer surfaces and remove contaminants. This method allows for the formation of stronger interactions, which improve the adhesion between the treated surface and a coating without reliance on the conventional anchor effect. Herein, the surface modification of cyclo olefin polymer films using VUV light was explored, and the effect of this treatment on the adhesion strength was evaluated. Under suitable conditions, the adhesion strength between electroless-deposited copper and the cyclo olefin polymer substrate can be significantly improved by VUV pre-treatment. Furthermore, we investigated the adhesion mechanism of electroless plating on surface reformed resin by VUV irradiation using a scanning transmission electron microscope.