Silicon Carbide wafers yield enhancement with SEMVision® G3MAXFIB application at STMicroelectronics production line

This paper is a result of a continuous cooperation between Applied Materials and STMicroelectronics Catania with the aim to develop a method to overcome the issues on Silicon Carbide (SiC) wafers and enhance devices yield.The proposed paper describes the unique methodology that was implemented at STMicroelectronics Catania to control, optimize, and enhance the yield of production line SiC, by using the inline SEMVision G3MAXFIB.