A comprehensive study on Spin-On-Dielectric (SOD) voids: root cause analysis, impact, and amelioration : EO: EquipmentOptimization

The paper highlights the impact of unoptimized SOD processing resulting in voids and downstream metal shorts filled up in the void. Spin-On-Dielectric (SOD) voids are one of the major concerns for scaled down devices specially with high aspect ratio. It elucidates the different factors like process, tool and environment conditions that affect the film. Furthermore, it discusses the different path for recovery of the issue with significant improvement through probe.