Series switch compatible with CMOS technology

Series MEMS switches with metal-to-metal contact have been fabricated to operate from DC to 40 GHz. Parylene is used as the structure material and polyamide as the sacrificial layer The mechanical structure is of bridge type. The measured insertion loss is less than 0.5 dB from DC to 40 GHz, when switch is on. The isolation ranges from 40 dB at 2 GHz to 15 dB at 40 GHz, when the switch is off. A new way of planarizing the circuit surface was presented.