Effect of Frequency on Reliability Of High-K MIM Capacitors

Dielectric relaxation phenomena in High-K capacitors have been reported to induce transitory effects. We present here a TDDB analysis including DC and pulsed DC stress applied on HK capacitors. We evidence a significant effect of frequency on TDDB. Using a model based on dielectric polarization dynamics, we found a good agreement with TDDB evolution with frequency but also a consistent behavior in terms of voltage acceleration factor as well as activation energy.