A Shielded QMSIW Wideband Filter with Low Insertion Loss Based On Through Silicon Vias

In this paper, a through silicon vias based shielded quarter-mode substrate integrated waveguide (QMSIW) on-chip filter is presented. The exhibited filter has a wide passband, low insertion loss and wide stopband. The shielded QMSIW cavity furnishes a compact size and high quality factor. The filter with a center frequency of 15.87 GHz is designed. The 3dB-fractional bandwidth is 46.6%. The insert loss is 0.61 dB and the return loss is 17.36 dB. The filter has a stopband of up to 46.68 GHz (2.94f
0
) and a rejection level of 10 dB.