A Compliant Self-Stabilization Nanopositioning Device With Modified Active–Passive Hybrid Vibration Isolation Strategy

Micro/mini light-emitting diodes (LEDs) display panel inspection and repairs have a high demand for vibration isolating devices to protect industrial-level atomic force microscopes (AFM scanning head) against vibrations. The motivation of this work is to combine the advantages of both passive and active vibration isolation strategies to improve inspection performance. The developed self-stabilization device achieves this objective with a design that incorporates a suspension-type passive vibration isolation unit and integrates it with the modified active–passive hybrid (MAPH) vibration isolation strategy using piezoelectric ceramics (PZT) and voice coil motors (VCM) as compensators. First, the design, modeling, and optimization of a self-stabilization device are presented based on the MAPH vibration isolation strategy. To satisfy the requirements of vibration isolation performance and a lightweight design, a multiobjective optimization task was conducted. Next, a tailor-made double compensating PID controller was designed to allow this mechanism to run in the MAPH method to effectively isolate vibrations. Finally, a series of validation experiments, including passive vibration isolation performance tests and MAPH closed-loop tests, were applied. From 1 to 500 Hz, more than 98% frequency domain achieved a vibration isolation rate of 90%, the vibration amplification effect of the passive vibration isolation was significantly suppressed, the steady-state positioning accuracy reached
$\pm 0.1\;\mu$
m, load capacity was up to 2.5 kg, the attenuation ratio of the disturbances reached up to 70%, and the heat of the VCM was effectively reduced. All results comprehensively confirmed that the developed compliant MAPH vibration isolation system has achieved a satisfactory self-stabilization function.