A high-performance resonant MEMS accelerometer with a residual bias error of 30 μg and scale factor repeatability of 2 ppm

This paper reports results of a high-performance navigation-grade resonant microelectromechanical systems (MEMS) accelerometer with a ±25g dynamic range demonstrating a bias and scale factor (SF) repeatability of 30 μg and 2 ppm respectively over an operational temperature range of -40° to 80°C. The output Allan deviation for measurements conducted at 30°C reveals an in-run bias instability of 35 ng and a velocity random walk of 0.34 μg/✓IIz.