Highly Flexible Piezoelectric Pressure Sensor at Extremely High-Temperature Range Using Ultrawide-Bandgap III-N Thin Films

Pressure monitoring in extreme conditions, such as in industrial, aerospace, and radioactive atmosphere, is crucial. Our focus is on developing and researching piezoelectric sensors that are highly flexible for detecting gas pressures at extremely high temperatures. We develop the flexible device using epitaxial III -nitride film, which is single-crystalline, by layer-transfer method. The sensor shows a sensitive and stable operation for extended periods. We use software simulation and relevant formulas to support our experimental findings.