Sensitivity Analysis of a Flexible Piezoresistive Sensor for Efficient Packaging

In this study, the packaging requirements and challenges of a microstructure-based flexible piezoresistive pressure sensor are investigated. The sensor shows a high value of sensitivity of $9.51 \mathrm{kPa}^{-1}$ at low $(0-10 \mathrm{kPa}), 0.24 \mathrm{kPa}^{-1}$ at medium $(10-40 \mathrm{kPa})$, and $0.11 \mathrm{kPa}^{-1}$ at high pressure ranges (40- 70 kPa). The sensor was experimentally characterized for a pressure range of $0-70 \mathrm{kPa}$ and its piezoresistive response was measured. Sensitivity performance at different regions of the sensor was analyzed. The experimental data for sensitivity shows a high variation in the sensitivity of the sensor for different regions of pressure application with values being quite low at the periphery and a high value near the center (equivalent to the case of uniform applied pressure). Packaging issues related to the sensor are addressed based on the outcomes.