A novel method for micro-nano channel alignment with automatic features based on reconstructed Hough transform theory

A novel method for micro-nano channel alignment with automatic features is presented. Hough transform theory at the micro-nano scale is reconstructed to investigate the effect of Hough parameters including Hough angle and Threshold on alignment accuracy. The results demonstrate that for a given angle of 100, the number of lines and intersection points is increased by decreasing the value of the Threshold. When angle and Threshold are 100 and 125 respectively, the number of lines and intersection points are 5 and 4, meanwhile, the range of angle is 89-90. Furthermore, the recognition time of the micro-nano channel is 0.18s. Compared to some conventional alignment methods of the chip, this paper’s method based on the Hough transform theory avoids the error and time-consuming process.