High performance 1200V SiC MOSFET platform with AEC-Q101 certificate

A high-performance 1200V 4H-SiC MOSFET platform has been successfully developed with the reliability certification of vehicle specification. In this paper, fabrication, electrical characterization, and reliability certification of 1200V 4H-SiC MOSFET are reported. By optimizing device structure and fabrication process, a low specific on-resistance (Rsp,on) of 3.3 mΩ*cm² of 4H-SiC MOSFETs has been achieved on 1200V rated products, and very efficient 1200V/75mΩ 4H-SiC DMOSFETs were successfully fabricated. The highly reliable 1200V 4H-SiC MOSFET platform has been awarded the AEC-Q101 certificate by MOSFET reliability certification organization.