Efficient Transient Thermal Simulation of Interconnects under ESD Stress by Laguerre-Based Finite Element Method

In this work, a Laguerre-based finite-element method (LBFEM) combined with the data filtering technique is presented for transient thermal simulation of multilevel interconnects under electrostatic discharge (ESD) stress. By employing the data filtering technique, much fewer basis functions are required to achieve the same accuracy compared with the original LBFEM, which significantly speed up the simulation time. The accuracy and efficiency of this method are validated by a representative example.