Electronic-Nose: An Array of 16 MOS-Gas Sensors Integrated With Temperature and Moisture Sensing Capabilities

This paper reports a new design of electronic-nose based on the Micro Electromechanical System (MEMS). An array of multiple metal-oxide semiconductor (MOS) gas sensors integrated with temperature and moisture sensing channels are fabricated on a single chip. Benefiting from the heat and humidity sensing capabilities, this electronic-nose exhibits an enhanced gas sensing property with improved accuracy. As low as 0.2 ppm of H2S can be successfully identified, and the resistance of the gas sensor corresponding to the long-term stability drifts only about 3% after 100 days. It opens up new opportunities for fabricating bionic olfactory microsystems with multiple sensing channels and shows its potential for precisely detecting complex gases in practical applications.