LNOI Thin-Film Dual-Axis Resonant Micro-Mirror with E16 Torsional Actuation

In this work, the dual-axis resonant micro-mirrors based on the 128°Y-cut lithium niobate on insulator (LNOI) have been experimentally demonstrated for the first time. We pioneered the utilization of the anisotropy of lithium niobate materials to simplify the control of micro-mirrors. Two pairs of e
16
torsional actuators are used to drive torsion mode and rocking mode, respectively. High electro-mechanical coupling factor ${K^2}_{16}$ in two orthogonal in-plane directions is required to achieve dual-axis actuation. The frequencies of the torsion mode and rocking mode are up to 60.034 kHz and 205.347 kHz, respectively. The corresponding optical angles of torsion mode and rocking mode are 13.04° and 9.16° in the air when the drive voltage is 10 V
PP
. Our work provides a novel solution for dual-axis piezoelectric MEMS micro-mirrors, which is promising for application in miniaturized optical systems.