A Novel Comb Design for Enhanced Power and Bandwidth in Electrostatic Mems Energy Converters

Silicon-based kinetic energy converters employing variable capacitors hold promise as power sources for Internet of Things devices. However, they are plagued by low power output and a limited range for operation frequency. The objective of this work is to address these important challenges for a harvester based on interdigitated variable capacitors and gap-closing topography. The approach explored here employs non-uniform cross-section electrodes and a springless mass. The purpose is to enable frequency-up conversion following electrodes’ impact and the impact of the springless mass with the shuttle mass. Frequency up-conversion is demonstrated experimentally and supported by the theoretical model.