Implementation of a Monolithic SoC Environmental Sensing Hub Using CMOS-MEMS Technique

This study demonstrates a novel monolithic environmental sensing hub using CMOS MEMS processes. Merits of the proposed design are: (1) SoC environmental sensing hub monolithically integrated the gas sensor, anemometer, humidity sensor, visible light sensor and thermometer on a single chip, and (2) the compatibility of post-CMOS processes to implement a SoC environment sensing hub. The environmental sensing hub has been successfully implemented using TSMC 0.18μm 1P6M CMOS process and in-house post-process. Measurement results show that sensitivities of gas sensor, anemometer, humidity sensor and thermometer are respectively 0.057 %/% (O
2
), 0.5 Ω/ms-1, 1.6 pF/%RH and 0.6307 mV/ºC. The sensitivities of visible-light sensor for each wavelength are 2.47 mV/µW (443 nm), 5.21 mV/µW (522 nm) and 8.94 mV/µW (634 nm). The fabricated environmental sensing hub reveals the highly integrated monolithic CMOS-MEMS system-on-chip (SoC) applications.