An Integrated Mems Device for in-Situ Four-Probe Electro-Mechanical Characterization of PT Nanobeam

A miniaturized micro-electro-mechanical system (MEMS) device with a standard SOI process is presented, which integrates three parts, a thermal actuator, a four- probe electro-mechanical coupled test platform, and a capacitive sensor, to realize the four-probe electro- mechanical in-situ scanning electron microscopy or transmission electron microscopy (SEM/TEM) test for nanomaterials. Furthermore, it declares the electrical- mechanical properties of the Pt nanobeam fabricated by focused ion beam induced deposition (IBID) with the proposed device. The experimental results demonstrate that the resistance of IBID Pt increases with strain. Young's modulus and fracture strength are 84.24 GPa and 3.66 GPa, respectively. The results indicate that the proposed MEMS device will facilitate the in-situ test of 1D/2D nanomaterials.