0.5MM×0.5MM 150KPA-Measure-Range High-Temperature Pressure Sensor with High-Performance and Low Fabrication-Cost

This paper reports a high temperature pressure sensor fabricated with TUB (thin-film under bulk) micromachining process from the front side of an ordinary (111)-SOI silicon wafer. Compared with the reported high temperature pressure sensor, the fabricated pressure sensor chip-size is as tiny as 0.5mm × 0.5mm with high sensitivity and low non-linearity. The testing results show that the 150-kPa-range pressure sensor has a full-scale output of 65.39mV/150kPa/3.3V, very high combined accuracy of 0.13%·FS within the range of -55°C to 300°C, and a low thermal hysteresis of 0.22%·FS at 300°C. In addition, the TCO (temperature coefficient of offset) is also tested to be as low as 0.01%/◦C·FS for a full measure range of 150 kPa and the TCS (temperature coefficient of sensitivity) is about -0.07%/◦C·FS.