Suspended Nanochannel Resonators Made by Nanoimprint and Gas Phase Deposition

In this work, we report on the fabrication of fluidic devices with hollow, suspended nanochannels, made by a combination of nanoimprint lithography and gas-phase deposition. We fabricated and characterized complete fluidic devices with arrays of nanochannels in the range of 500 nm x 500 nm to 700 nm x 700 nm, 30 µm long, with wall thickness just few tens of nm thick. We also developed a COMSOL model to predict the motion and resonance frequency range of the hollow beams with different materials, geometries, and investigate the relevant damping conditions.