Modal Quality Factor Inversion of Non-Slender Mems Resonators Between Gases and Liquids

We present a semi-numerical method for determining the dynamics of non-slender structures in viscous fluids. An investigation of the quality factor (Q-factor) of the vibrational modes of non-slender structures in gases and liquids reveals that, in gases, the conventional Euler-Bernoulli (EB) modes exhibit the lowest Q-factors, while non-EB modes exhibit the highest Q-factors. In liquids, the opposite occurs. EB modes exhibit the highest Q-factors, and non-EB modes the lowest. This opposite Q-factor pattern in gases and liquids is the modal quality factor inversion. We expect the modal quality factor inversion of non-slender resonator geometries to enable novel MEMS fluid sensors.