Mems-Based Water Collection Condensation Particle Counter (WCCPC) Optimized for Multi-Point Monitoring of Airborne Nanoparticles

Although monitoring of airborne nanoparticles is important due to their fatal health risk, personal devices for this purpose have not been developed yet. For accurate and sensitive monitoring of nanoparticle in personal environments, we developed a compact and low-cost MEMS-based WCCPC. Our system was able to accurately detect test nanoparticles through quantitative experiments (within 7.57% difference), and showed performance comparable to that of the reference CPC for one week in an external environment.