Multi-Mode E-Skin Integrating Capacitive-Piezoelectric Sensors for Static-Dynamic Mechanoresponse with Wide Sensing Range

Emulating human somatosensory response requires integrated (dynamic and static) mechanoresponsive capabilities that demand multimode implementation. Here, we introduce a multimode mechanoreceptor for detecting dynamic stimuli using piezoelectric sensing-mode (P-mode) and static stimuli using capacitive mode (C-mode). For P-mode, the piezoelectric layer is sandwiched between electrodes to mimic dynamic response and to respond to static stimuli μ-pyramidal shaped capacitive device is integrated. This synergetic effect allows for a broader detection range of 1 kPa to 140 kPa, which is simply missing in their standalone responses (C-mode: 1 kPa-to-25 kPa @ 30fF/kPa and P-mode: 20 kPa-to-140 kPa @ 150 mV/kPa). Our method simplifies the sensory integration for modern e-skins. A real-time human grabbing and holding activity validates its functionality for static/dynamic stimuli.