Large-Scale Arrays of Tunable Monolayer MoS2 Nanoelectromechanical Resonators

We report on the first demonstration on scaled fabrication of electrically tunable monolayer molybdenum disulfide (MoS
2
) nanoelectromechanical resonator arrays. A centimeter-sized monolayer MoS
2
film is grown by chemical vapor deposition (CVD), and then transferred onto the substrate with pre-patterned microtrench and electrode arrays, resulting in freely suspended nanoelectromechanical resonator arrays based on two-dimensional (2D) MoS
2
membranes. Raman and photoluminescence (PL) measurements confirm the monolayer thickness and uniformity of material properties. We experimentally demonstrate resonance excitation and detection, nonlinear resonances, as well as electrostatic frequency tuning, in these arrayed MoS
2
resonators. The resonators show resonance frequency tuning ranges (Δf/f
0
) up to 21%, as well as gate tuning of quality (Q) factors (|ΔQ/Q
0
|) by up to 44%. These arrays of 2D nanoelectromechanical resonators can enable more complex circuits at large scale.