Resonant d33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes

This work reports a resonant piezoelectric mirror driven by rotated directional interdigitated electrodes exploiting the d
33
mode. This work expands the prior work on directional IDEs where only small angle, quasistatic devices were reported. We, for the first time combine this actuation principle with mechanical amplification and demonstrate that it can be used to excite high-speed and high amplitude scanning mirrors. A torsional twist of 0.66°, measured at the end of the actuators was mechanically amplified by over 30x to achieve an optical scan angle (OSA) of 20° at 29.7 kHz, with a Q-factor of 2481. This work marks the highest OSA achieved with directional interdigitated electrodes so far.