Piezoelectrically Actuated Micromirror with Dynamic Deformation Compensation Mechanism

This paper reports a piezoelectrically actuated micromirror with an active control of the dynamic deformation. The proposed approach allows a reduction of dynamic deformation without increasing the moment of inertia, for the first time in field. A 75 % dynamic deformation reduction at the center of mirror was calculated and the dynamic mirror shape correction was experimentally confirmed on devices fabricated.