A Novel Disk-Shaped Microsphere Manipulation Device Based On Bulk Acoustic Wave

To realize the non-contact linear movement of microsphere which has the characteristics of high viscosity, small size, and fragile structure, an acoustic manipulation device based on bulk acoustic wave is proposed, fabricated and experimented in this paper. This manipulation device holds the merits of simple structure and the ability to manipulate large particles in micro scale. The finite element simulation method is used to determine the vibration mode of the device to form an appropriate standing wave acoustic field in the liquid. The acoustic pressure simulation of the liquid is carried out to study the distributions of the acoustic wave nodes. In the experiment, within a certain range, the farther the excitation frequency deviates from the resonance frequency, the microsphere is manipulated more stable. And the microsphere with large diameter has a faster motion velocity. The linear motion of different diameter microspheres from the container center to the circumference can be realized. The proposed non-contact manipulation device for the ICF capsule has broad application prospects in its non-destructive detection.