Design of a Compact Two-Dimensional Parallel Linear Platform Based on Piezoelectric Impact Drive Mechanism

To cope with the current situation of micro/nano-level space manipulation in various fields such as biomedical and industrial manufacturing, this paper designs a compact two-dimensional parallel linear platform based on piezoelectric impact drive mechanism. First, the platform uses four sets of symmetrical L-shaped flexible beams and a specific piezoelectric drive method to achieve linear drive in two vertical directions of the stator. Then, the static and dynamic simulations of the platform were completed using the finite element analysis software ANSYS to optimize the structural properties. Finally, a prototype platform was fabricated and experimentally tested to evaluate the basic performances of the platform. The linear displacement resolution of the platform is 0.05 μm, and the maximum motion speed in the X/Y directions is 3.93 mm/s and 3.63 mm/s, respectively, which has the advantages of high speed and high precision.