Fatigue Mechanism of Antiferroelectric Hf0.1Zr0.9O2 Toward Endurance Immunity by Opposite Polarity Cycling Recovery (OPCR) for eDRAM

Opposite polarity cycling recovery (OPCR) is proposed to completely restore a fatigued antiferroelectric (AFE) capacitor back to its initial state, thereby extending the endurance number of switching cycles for AFE-RAM. A comprehensive model exclusive to AFE with unipolar cycling is revealed to achieve unlimited endurance, and the unipolar cycling with OPCR is experimentally demonstrated to accumulate
$10^{{12}}$
cycles, while achieving the nondegradation and complete restoration of the remnant polarization (
${P}_{r}$
). Furthermore, the proposed OPCR achieves a recovery time ratio of 0% (
${t}_{\text {recovery}}/{t}_{\text {period}}$
), which indicates no extra time to spend for the recovery procedure.