Maintenance Content Reduction and Digitalization for Performance Optimization

One bedrock requirement within the semiconductor industry is the need for a comprehensive maintenance program to support reliable and predictable tool performance. While this is true, it is certainly not the case where “more is better,” but rather an effort to define the truly necessary actions and best-known methods in maintaining tools to optimize availability, productivity, and product quality. The ongoing development and integration of Smart Manufacturing solutions across the factory systems landscape is now playing a role toward these objectives in providing a foundation for defining, deploying, and managing optimized maintenance task workflows. This paper will present both the efforts of companies using FabRecover, a novel maintenance management decision support framework, and the resulting demonstrable improvements that were achieved through such investments.