Short-Open-Load (SOL) Calibration Technique for Accurate Parameter Extraction in Micro-Coaxial-Line Circuit

In this paper, a short-open-load (SOL) calibration technique is used to accurately extract the lumped parameters of micro-coaxial-line circuit. SOL technique avoids the tedious field calculation algorithm in numerical de-embedding, and the operation process is more concise. With the help of SOL technique, the non-uniform feed lines of loading periodic release holes and the parameters of core circuit can be de-embedded. Taking micro-fabricated inductor and capacitor for instance, the lumped parameters are successfully extracted. Good agreements between the circuit parameters obtained by SOL calibration technique and commercial software ANSYS HFSS indicates that SOL technique can accurately de-embed the micro-coaxial-line circuit.