XBAW, An Enabling Technology for Next Generation Resonators and Filter Solutions for 5G and Wi-Fi 6/6E/7 applications (Invited)

We report XBAW, a bulk acoustic wave (BAW) manufacturing technology using a unique transferred substrate process for next generation 5G and Wi-Fi 6/6E/7 application. This work reports performance metrics of resonators and filters built from high quality Aluminum Scandium Nitride (AlScN) piezoelectric films of varying Sc concentrations grown on 150mm < 100 > silicon substrates. Bulk acoustic wave resonators were fabricated using XBAW technology ranging from 5 GHz to 7 GHz and using varying Sc concentrations. The trade space between acoustic Q factors and $\text{k}_{t}^{2}$ and dependence on Sc concentration is presented. We report multiple distinct filtering solutions for WiFi 6/6E/7 systems enabling optimal and flexible system utilization of available 160 MHz channels in UNII bands 1 through 8, including a diplexer with 50 dB of isolation between channels. These results show XBAW capability to extract maximum resonator FOM from AlScN, enabling optimal design of high-performance filters.