A New Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection

A novel on-wafer self-powered wireless sensing module for extreme ultraviolet (EUV) lithographic process is proposed. A surface sensing pad controlled oscillator oscillate at a frequency proportional to the EUV intensity, where its signal is transmitted wirelessly through an on-chip antenna (OCA). Therefore, the self-powered sensor module can provide wireless EUV monitoring across wafer in advanced lithographic chambers.