Channels, Layout and Size Scalability of Implantable CMOS-Based Multielectrode Array Probes

Micro-structured monolithic CMOS devices enable the integration of dense microelectrode arrays and on-chip circuits for low-power implantable brain interfaces with single neuron spatiotemporal resolution. Here, we demonstrate the scalability of SiNAPS CMOS-probe technology with respect to different probe layouts, array sizes and shank dimensions down to microwire size ranges.