Particle Trapping and Transportation with MEMS Zeroth-order Bessel Beam Acoustic Transducer (BBAT)

As a promising non-contact and non-invasive manipulation technology, acoustic particle manipulation (APM) has wide application potential in fields like material science, chemical analysis, biomedical engineering, etc., particularly given its mechanical vibration nature and impressive biocompatibility. One of the key research areas in APM is designing and implementing different acoustic beams for different application scenarios. Bessel beams, in both zeroth-order or high order form, have thus gained great attention in academia for its excellent propagation characteristics, like non-diffraction, self-healing, etc., which are quite favored in applications like targeted drug delivery. In this paper, we propose a MEMS zeroth-order Bessel beam acoustic transducer (BBAT) based on soft-lithography, in terms of its design, simulation, fabrication, and experiments over its capacity for negative impedance contrast particle trapping and transportation in water medium. The proposed BBAT has advantages over existing technology from the perspectives of monolithic compactness, portability, and bio-compatible. Experimental results well demonstrated that the BBAT can firmly trap and transport particle in long distance, which can benefit cell manipulation and drug delivery.