PMBVD Model Parameter Extraction and Optimization for Film Bulk Acoustic Resonator

This work builds a Modified Mason model and extracts the parameters of the Parasitic Modified Butterworth-Van Dyke(PMBVD) from the resonance curves, which can simulate the impedance characteristics of Film Bulk Acoustic Resonator(FBAR) in the full waveband more accurately. By including the effective area of the support layer and the effective area of electrode into the model, as well as adding parasitic capacitance, inductance and resistance introduced by packaging, the extracted resonance curves can provide a more accurate representation of the impedance characteristics and Q-value of the resonator near the resonance point, making it easier to fit to the test parameters. After the extraction, Yield Analysis performed to demonstrate the accuracy of the extracted parameters. By demonstrating excellent agreement between the extracted parameters and the measurement data, the PMBVD model developed in this work provides a more accurate guideline for 5G filter design.