Laser Actuation of 3D-Printed Microbeam with CNT as Functional Layer

We present a novel method to set in motion a 3D-printed microbeam using IR laser diode radiation. Thanks to this an intentional actuation, so-called 4D-printing, was achieved. As a smart material, for local absorption and conversion of IR radiation energy into heat, a carbon nanotube coating is used on the top microbeam surface. To the best of the authors’ knowledge, this type of approach has not been presented in the literature so far and it offers a technological novelty in the field of 3D printed microactuators for MEMS.