Improvement of Potassium-Ion SiO2 Electret Potential by Controlling Flowrate in Oxidation Process

Potassium-ion silicon electret (K-SiO
2
) is a promising material for electrostatic type vibrational energy harvesting device enabled by micro-electro-mechanical system (VEH-MEMS). The power generation of VEH-MEMS can be enhanced by increasing the potential of electret. In this work, we report an improvement of 49.3% in potential of K-SiO
2
electret thin film compared to the existing method. This is achieved by controlling the feed gas flowrate during wet oxidation process and applying vacuum annealing before charging process.