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Jun 2013
1 Hour
Access this Course
This course is part of our eLearning Archive, which includes older courses that may not be current or as user-friendly as courses designed more recently. Microelectromechanical systems (MEMS) include a whole class of devices built at the microscale that couple mechanical motion to electrical signals, and vice versa. These include sensors, actuators, and resonators. NEMS is the nanoscale equivalent of MEMS, namely, nanoelectromechanical systems. NEMS provide several advantages over MEMS for certain applications, including higher frequencies and better accuracy. In this course Dr. Tsakalakos discusses the materials and fabrication techniques for MEMS and related topics including microfluidics, electromechanics, MEMS sensors and actuators, polymer-based MEMS, and issues related to design and scaling, characterization and testing and packaging. He also reviews NEMS fabrication techniques and the advantages of NEMS as compared to MEMS.
Author Keywords: Nanoelectromechanical systems, nanotechnology
IEEE Keywords: Actuators, Design methodology, Electromechanical sensors, Electron devices, Fabrication, Fluidics, Microelectromechanical systems, Microfluidics, Micromechanical devices, Nanoelectromechanical systems, Polymers
Persistent Link: https://ieeexplore.ieee.org/servlet/opac?mdnumber=EW1369 More »
Level: Intermediate
Instructor
Loucas Tsakalakos
Dr. Loucas Tsakalakos is a Senior Scientist and Project Leader at the General Electric - Global Research Center (GRC). He received his B.S. degree from Rutgers University and his M.S. and Ph.D. degrees from the University of California, Berkeley in Materials Science & Engineering. He has written ove... Show More
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