Author details

Tai Tsuchizawa
Also published under: T. Tsuchizawa
Affiliation
Platform Photonics Research Center
National Institute of Advanced Industrial Science and Technology (AIST)
Tsukuba, Japan
Biography
Tai Tsuchizawa received the Ph.D. degree from the Department of Pure and Applied Sciences, University of Tokyo, Japan, in 1990.,Currently, he is a Senior Research Engineer, NTT Microsystem Integration Laboratories, Atsugi, Japan. In NTT's laboratories, he has engaged in studies on ECR plasma technology and its application to an etching process for microfabrication. His recent interest is fabrication technologies for silicon-based optoelectronics devices. He has also participated in the MIRAI project for on-chip optical interconnection since 2006.(Based on document published on 16 June 2009). Author's Published Works