Author details

Duane Boning
Also published under: D. Boning, D. S. Boning, Duane S. Boning
Affiliation
Massachusetts Institute of Technology
Cambridge
MA, USA
Biography
Duane S. Boning (S'90–M'91–SM'00–F'05) received the B.S., M.S., and Ph.D. degrees from the Massachusetts Institute of Technology (MIT), Cambridge.,Currently, he is a Professor of electrical engineering and computer science and Associate Head for Electrical Engineering in the EECS Department, MIT. His research focus is variation modeling, control, and environmental issues in semiconductor and MEMS manufacturing with emphasis on chemical–mechanical polishing and plasma etch, and CAD tools for statistical process, device, and circuit design. He has written over 120 papers and conference presentations in these areas of research. From 1991 to 1993, he was a Member of the Technical Staff at Texas Instruments, Dallas. He served as the Associate Di... Author's Published Works