Author details

Bau-Tong Dai
Affiliation
National Nano Device Laboratories, Hsinchu, Taiwan
Biography
Bau-Tong Dai received the B.S. degree in electrical engineering from Cheng-Kung University in 1968 and the M.S. degree from the Institute of Electronics, National Chiao-Tung University, Hsinchu, Taiwan, R.O.C., in 1970. He received the Ph.D. degree in electrical engineering from the University of Southern California in 1987.,Since 1992, he has been a Researcher with the National Nano Device Laboratories. He has conducted research in chemical-mechanical polishing, copper plating and electropolishing, low k material, thin film deposition and etching, and MEMS fabrications. He has authored or coauthored over 100 technical papers. His research interests include nanotechnology fabrication, nano science and technology, and VLSI technology. From 1... Author's Published Works