Simulation Comparison of Electrical Characterization in PZT and PVDF on Copper (Cu) substrate based MEMS piezoelectric harvester

The aim of the work is to simulate and characterize lead zirconate titanate (PZT) on copper (Cu) substrate based MEMS piezoelectric energy harvester and compared with Polyvinylidene fluoride (PVDF). The two groups were PZT on Cu substrate and PVDF on Cu substrate.The simulation includes 20 samples each of two groups PVDF and PZT with 80% of pretest power and an error rate of 0.05. The samples represent average harvested power. Results: The average harvested power of PZT has the highest mean of 506.947 W (p ! 0.05) and PVDF has the lowest mean of 182.845 W with a significance value of 0.00 (p ! 0.05). PZT/copper based MEMS energy harvester has better efficiency than PVDF/Copper. e fluoride (PVDF); novel piezoelectric material; copper substrate; piezoelectric energy harvester; MEMS technologyr,