The scanning electron microscope as sensor system for mobile microrobots

The presented mobile microrobots are employed inside the vacuum chamber of a scanning electron microscope (SEM). Very often more than one robot is required even for simple handling tasks due to the unfamiliar force ratios in the micro world. This paper describes how the SEM is used as a position sensor system that is a presupposition of the automatic coordination of microrobots. For depth measurements a triangulation principle with the help of the electron beam is used. First results and the required calibration methods are presented.