Effect of Oxygen plasma treatment on the performance of GaN-based MIS-HEMTs

We have studied the effects of oxygen plasma treatment prior to insulator deposition on the electrical performance of AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors (MIS-HEMTs). Devices treated with oxygen plasma exhibit more positive threshold voltages, less hysteresis in transfer curves and higher peak transconductance values compared with reference devices without oxygen plasma treatment. Our results suggest that oxygen plasma treatment of the AlGaN surface before insulator deposition can improve the overall electrical performance of GaN-based MIS-HEMTs.