Autonomic information system for pre-production of modern LSIs

To realize an efficient pre-production line, we developed "Autonomic Information System for modern LSIs " (AIS). This system is combined with yield management system (YMS) and manufacturing management system (Fab Host) by using personal computers. It distributes visual information about loss-time of bottleneck equipment on production clearly and a particle map with background data for each lot and each process. By using this information system, all the concerned persons (line manager, engineers and technicians) can dissolve problems independently, appropriately and quickly like the autonomic nervous system works in the human body. "AIS" has been developing in our R&D pilot line as a loss-time reduction tool.