Yield analysis and improvement by reducing manufacturing fluctuation noise

There are various types of failures and their causes intertwined one another complicatedly. Therefore, we need to recognize timely what any kind of failure causes affect to total yield quantitatively to decide the countermeasures for yield improvement. Collected data for data analysis involve the noise with various influences. For example, analyzing all collected data always does not bring us precious correlation between the collected data. We prefer to adapt a new method to get more precious information. We have got many success stories for yield improvement by data mining which is one of the statistical methods, now we have succeeded in developing a method to clarify the correlation between yield and various wafer parametrical data value, because the data can be extracted to reduce the influence of the manufacturing fluctuation automatically.